Axcelis Ion implantation systems, built on our next-gen Purion platform, delivers precision, purity, and productivity with the lowest cost of ownership.

Axcelis 離子植入系統，建立於我們新一代的 Purion 平台上，提供精密、純度和生產力及最低的生產成本。

The GSD platform is the industry benchmark for the longest manufactured and supported batch ion implanter. The Ovation™ is the latest batch configuration designed to seamlessly integrate …

GSD Ovation 旨在與現有的 Axcelis 批量植入機無縫整合，提供最高的可靠度、可維護能力及最低的運營成本。

A modern ion implanter costs about $2–5 million, depending on the model and the wafer size it processes. Of the three classes of implanters, the high-current machines have traditionally …

Axcelis engineers will work with you to develop technology extensions to optimize your Purion implanter to your precise needs. As those needs evolve, so does your Purion …

The Axcelis Purion XE Series is the industry standard for demanding high energy ion implantation, offering a wider energy range and greater reliability.

The NV-10-60 is the industry’s first commercial high current implanter. Revolutionary design features include sliding seal technology, bi-directional mechanical scanning, superb dose …

For at least the next 20 years Eaton Nova and SEN shared ion implanter technology and engineering. This resulted in the NV10’s being fitted with a serial process chamber developed …

Axcelis Purion H ion implanters bring extreme purity and precision to high-current applications. Achieve greater yield with the lowest cost of ownership.